20191101 SX Alignement of 4D head to remove

20191017
  • 45 mm from end
  • -0.375

20191025
  • 104 mm from end
  • -1.06

17:40 Copied the above images to 20191101
  • spherical__45mm_m0.375.jpg
  • spherical_104mm_m1.09.jpg

18:15 Aligned
  • add z5: -0.1, z6:-0.6
  • remove focus with Hexapod
    • -0.709, 3.22, -0.075, -10, -13
  • 63 term fit
    • spherical_104mm_p1.76_62terms.jpg
    • primary sp: 1.76, sec sp: 2.75, ter sp: 2.1, etc

18:23 15 terms (same as previous days measurement)
  • Focus, astig and coma about the same as 20191025
  • spherical_104mm_m1.09_15terms.jpg
  • will start moving
  • M2 Z:-0.055

18:39 move to 70 mm
  • change focus and t/t
    • z3: 70
    • z2: -10
    • M2 z:-0.255
    • spherical_70mm_m0.73.jpg
  • plot sp -vs- mm
    • sp = 0.0 at mm = 12.6

18:55 move to -70mm (maybe...)
  • Z2 105
  • Z3 205
  • M2 Z: -1.11
  • spherical_m70mm_p0.6.jpg

19:20 move 13mm
  • Z3: -90
  • Z2: 20
  • M2 Z:-0.61
  • sp
  • spherical_13mm_m0.247.jpg

19:31 move to -3 mm
  • sp -0.06
  • spherical__m3mm_m0.06.jpg

19:45 move to -11 mm
  • sp 0.02
  • spherical__m11mm_p0.03.jpg

19:53 move to -8 mm
  • sp 0.009 (variance = +-0.02)
  • spherical_m8mm_p0.009.jpg
  • Residual wavefornt with Z2-Z11 removed is ~55 nm. Quite good.

-- DougMiller - 01 Nov 2019
  • spherical__m8mm_p0.009.jpg:
    spherical__m8mm_p0.009.jpg

  • m2.jpg:
    m2.jpg

  • mm-vs-sp.jpg:
    mm-vs-sp.jpg
Topic revision: r2 - 01 Nov 2019, DougMiller
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